| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an ultrasonic cleaner that suppresses the thermal deterioration of an ultrasonic oscillator and is equipped with high cleaning efficiency. <P>SOLUTION: In this ultrasonic cleaner which imparts ultrasonic wave to a cleaning liquid L on the cleaning surface of a substance S to be cleaned by an ultrasonic wave imparting head 21, the ultrasonic wave imparting head 21 is provided with an ultrasonic lens 23 which is installed oppositely to the cleaning surface and equipped with a curve surface at the lower end face 23a positioned at the cleaning surface side, an ultrasonic oscillator 25 which is installed at the upper end face 23c of the ultrasonic lens 23 and imparts the ultrasonic wave to the cleaning liquid L on the cleaning surface through the ultrasonic lens 23 while oscillating ultrasonic wave and a notch part 24 which is installed at the ultrasonic lens 23 and prevents the ultrasonic wave imparted to the cleaning liquid L from reflecting on the cleaning surface and being incident to the ultrasonic oscillator 25 via the ultrasonic lens. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
