| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a system and a method which efficiently investigates the cause of a defect occurred in continuously processing a plurality of products, using a cheap apparatus. <P>SOLUTION: The system temporarily saves continuous images obtained by high speed photographing of a processing operation, photographs a processed product, compares the photographed product image with a previously recognized non-defective product image to decide the existence of any defect, successively saves the temporary saved continuous images for investigating the cause of a defect if found, or may erase the continuous images if any defect is not found, thus enabling the successive acquisition of continuous images with a limited memory capacity. A condition photographing camera 21 takes images during processing; an inspective camera 23 takes images after processing; and a controller 25 decides the existence of any defect, decides whether the images are saved or erased, and controls the entire system. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
