| 摘要 |
PROBLEM TO BE SOLVED: To preclude a scanning beam flux from being scattered in a lens frame of an inspected optical system, even in inspection of a scanning optical system, to secure an effective inspection objective area for acquiring the scanning beam flux, and to acquire and inspect only the beam flux of an inspection object. SOLUTION: A propagation angle in every scanning position and postures of a shielding plate corresponding to individual differences are required to be regulated. A moving mechanism 19 for translating the shielding plate 18c perpendicular to an optical axis of an objective lens is provided therefore to remove reflection and scattering in the lens frame. Although scattering and diffraction of the beam flux by the shielding plate 18c is afraid therein, scattered light and diffraction light are regulated not to be image-focused on a photoreception face, by combination with the objective lens in an embodiment of the present invention, so as to solve the anxiety. COPYRIGHT: (C)2006,JPO&NCIPI
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