| 摘要 |
An inexpensive pasted substrate producing system for pasting substrates with high accuracy while exhibiting excellent maintainability. The pasted substrate producing system (31) comprises a vacuum processing chamber (34), means (35) for applying a pasting force to two sheets of substrates (W1, W2), and a drive means (36) for moving and turning a second holding plate and the vacuum processing chamber horizontally in order to align the two substrates. A first holding plate is connected with the pressure applying means through a first column (53) such that it is separated from the vacuum processing chamber. The second holding plate is connected with the drive means through a second column (56) such that it is separated from the vacuum processing chamber. Furthermore, the vacuum processing chamber is connected with the drive means through a third column (58).
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