| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an ink-jet recording head with high precision using amorphous carbon. SOLUTION: A metal mold 32 is formed using the method such as a Ni-electroforming on a matrix 30 formed in a lithography process such as a LIGA process or Si process. The shape of a nozzle plate 10 is formed on a thermoplastic resin 12 by the steps comprising a step of charging the thermoplastic resin 12 into a lower mold 34, a step of pressing the metal mold 32 as an upper mold on the former and a step of conveying and pressing the metal mold 32 in sequence by the way of step and repeat. A nozzle 14, an ink passage 16 and a chamber 18 are formed by the steps comprising a step of heating the metal mold 32 and the lower mold 34, a step of rising the temperature until reaching a B stage (gelated state) where the thermoplastic resin 12 gets softened and then a step of performing a stamping (in-print) with the metal mold 32. The applicable thermoplastic resin 12 is prepared by using the thermoplastic resin with a small coefficient of linear expansion such as an amide-imide and PPS as a binder and by adding the amorphous carbon particles to a filler agent using the binder. COPYRIGHT: (C)2006,JPO&NCIPI
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