| 摘要 |
PROBLEM TO BE SOLVED: To provide a carrier truck capable of efficiently adjusting a position of a wafer carrier regarding a horizontal direction and a vertical direction. SOLUTION: The carrier truck 100 is provided with a horizontal movement mechanism and a vertical movement mechanism. The horizontal movement mechanism has two rails 103 for supporting an arm support part 104 and is constituted such that the arm support part 104 is moved on the rail 103 to a direction of external force with an operation lever 108 when the external force in an extending direction of the rail 103 is applied to the operation lever 108. The vertical movement mechanism is provided with an eccentric cam 110 for supporting the horizontal movement mechanism and connected to a rotation board 109 of the operation lever 108 and is constituted such that the eccentric cam 110 is interlocked with the rotation board 109 of the operation lever 108 and is rotated and the horizontal movement mechanism is vertically moved when the operation lever 108 is turned. COPYRIGHT: (C)2006,JPO&NCIPI
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