| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a holder for fixing a substrate capable of obtaining stable adhesive force. <P>SOLUTION: The holder 1 for fixing the substrate comprises a holder base 3, and an adhesive layer 5 provided on the holder base 3. The adhesive layer 5 has an adhesive face 7 for adhesively fixing the substrate F, and a center part 9 of the adhesive face 7 is flatted and a peripheral part 11 is lower than the center part. Therefore the center part 9 of the adhesive face 7 is liable to closely contact with the substrate F to obtain a stable adhesive force. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
