摘要 |
PROBLEM TO BE SOLVED: To solve the problem that it is necessary to perform the vapor deposition of an insulating electron injection layer, metal with a low work function, and metal with a low electric resistance, three times for obtaining a high-performance negative electrode, and that this operation has been hard in terms of manufacturing man-hours and manufacturing costs, and that electric resistance generated on a film junction interface increases and the film exfoliates because the two film junction interfaces are formed when three times of vapor deposition are performed. SOLUTION: After forming the insulating electron injection layer, a composite deposit film with a composition gradient type, in which metal with not more than 4 of a work function is mainly deposited in the initial period of vapor deposition, and metal with the low electric resistance is mainly deposited in the end period of the vapor deposition, is formed by a signal vapor deposition operation to form a cathode. COPYRIGHT: (C)2006,JPO&NCIPI
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