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发明名称
Aufbau und Verfahren zur Auswertung von Signalzuständen in einem Sondenmeßnetzwerk
摘要
申请公布号
DE19614506(B4)
申请公布日期
2006.01.12
申请号
DE19961014506
申请日期
1996.04.12
申请人
CASCADE MICROTECH, INC.
发明人
STRID, ERIC W.;SCHAPPACHER, JERRY B.;CARLTON, DALE E.;GLEASON, K. REED
分类号
G01R31/26;G01R1/00;G01R1/067;G01R1/073;G01R31/02;G01R31/28;G01R35/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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