| 摘要 |
PROBLEM TO BE SOLVED: To provide a susceptor capable of preventing breakage at the end of cut of a wafer or inside wall of countersunk even if the wafer placed in the countersunk of the susceptor rotates or shifts. SOLUTION: The susceptor is provided with a recess in which a wafer is placed for thermal treatment, with the wafer comprising a cut with a flat surface at a part of disc. A protruding part for contacting to the flat surface of the cut is formed inside the recess. The protruding part is preferred to be dogleg shape, and preferred to comprise a flat surface to contact the cut by surface as well. Further, the tip of the protruding part is preferably formed arcuately. The susceptor is preferred to be used at epitaxial growth with a wafer or surface alteration, cleaning or annealing with the wafer. COPYRIGHT: (C)2006,JPO&NCIPI
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