| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a thin sheet which can manufacture the thin sheet having a stable quality over a long period of time by keeping the position of the liquid level of a melt stored in a container and used as a raw material for the thin sheet constant. SOLUTION: In manufacturing a silicon wafer as a thin sheet in the apparatus 1 for manufacturing the thin sheet by storing the melt 2 of silicon in a crucible 3, dipping the surface for crystalline growth of a ground substrate 4 into the melt 2 in the crucible 3, and growing silicon by solidification on the surface for crystalline growth of the ground substrate 4, when the amount of the melt 2 stored in the crucible 3 is reduced and the height of the liquid level is lowered, a container position regulating means 18 regulates the position of the crucible 3 so that the position of the liquid level of the melt becomes constant in the direction of gravity, and the apparatus 1 is constructed such that the limit position where the container position regulating means 18 can not regulate the height of the liquid level of the melt 2 can be detected by a container position detection means 19. COPYRIGHT: (C)2006,JPO&NCIPI
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