| 摘要 |
PROBLEM TO BE SOLVED: To provide a fluid sealing type active vibration isolation apparatus capable of approximately completely preventing a failure caused by foreign matters penetrating into an electromagnetic-type vibration exciting means while averting the problem of a degradation due to displacement of a vibration exciting plate in a pneumatic spring, and of a degradation due to ozone in a support rubber elastic body for supporting elastically the vibration exciting plate. SOLUTION: A part of a wall of a sealed chamber 154 which is defined between the vibration exciting plate 68 and an electromagnetic type driving means 96 and is sealed from an external space is made up with the support rubber elastic body 82 of the vibration exciting plate 68. Besides, a part of another wall of the sealed chamber 154 comprises a flexible partition wall 162 deformable based on pressure difference between the sealed chamber 154 and the external space. COPYRIGHT: (C)2006,JPO&NCIPI |
