| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating apparatus capable of applying a coating liquid with uniform width and thickness. SOLUTION: This coating apparatus is provided with a sponge 52 having a contact face 52A coming into contact with a surface to be coated and permeated with and holding a coating liquid, a dispenser 53 for dropping the coating liquid from the vertical top of the sponge 52, and a moving mechanism which holds the sponge 52 and moves it along the peripheral portion of a front substrate 10 at a constant speed while permitting the contact face 52A to come in contact with the inner surface of the front substrate 10 with constant contacting pressure, and able to apply a high resistance film 21 with uniform width and thickness. COPYRIGHT: (C)2006,JPO&NCIPI
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