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发明名称
method for forming gate insulating layer
摘要
申请公布号
KR100541674(B1)
申请公布日期
2006.01.11
申请号
KR20020067036
申请日期
2002.10.31
申请人
发明人
分类号
H01L21/334
主分类号
H01L21/334
代理机构
代理人
主权项
地址
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