发明名称 Optical coupling for testing integrated circuits
摘要 A method and system of testing integrated circuits (IC) via optical coupling. The optical system includes an optical fiber, fixture and focussing element. In addition, channels are provided in the fixture mounted on the integrated circuit to accommodate the optical system. The fixture acts as a heat sink. As such, one or more photosensitive elements/targets on the integrated circuit are probed using light that is brought to a focus on each target site. The light causes latching of data into the integrated circuit (which is operating under influence of a test program) and formation of a test pattern output from the integrated circuit that is used to confirm proper functioning of the IC.
申请公布号 US6985219(B2) 申请公布日期 2006.01.10
申请号 US20000746618 申请日期 2000.12.21
申请人 CREDENCE SYSTEMS CORPORATION 发明人 WILSHER KENNETH R.;KASAPI STEVEN A
分类号 G01N21/88;G01R1/06;G01R31/302;G01R31/311;G01R31/319 主分类号 G01N21/88
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