发明名称 Magnetic head having a deposited second magnetic shield and fabrication method therefor
摘要 The magnetic head includes a second magnetic shield that is fabricated in a deposition process. The present invention therefore does not require the deposition of the electrically conductive seed layer. In a preferred embodiment, the deposited second magnetic shield is comprised of cobalt zirconium tantalum (CZT). Because the CZT material is relatively soft, it is preferably deposited within an opening formed in a relatively hard RIEable material such as Ta<SUB>2</SUB>O<SUB>5</SUB>, SiO<SUB>2</SUB>, Si<SUB>3</SUB>N<SUB>3</SUB>, and SiO<SUB>x</SUB>N<SUB>y</SUB>, such that a subsequent chemical mechanical polishing (CMP) step can be conducted down to the surface of the relatively hard layer.
申请公布号 US2006002023(A1) 申请公布日期 2006.01.05
申请号 US20040883327 申请日期 2004.06.30
申请人 LE QUANG;LEE EDWIN HIN P;LI JUI-LUNG;SUN NIAN-XIANG;ZHENG YI 发明人 LE QUANG;LEE EDWIN HIN P.;LI JUI-LUNG;SUN NIAN-XIANG;ZHENG YI
分类号 G11B5/147;G11B5/127;G11B5/33 主分类号 G11B5/147
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