| 摘要 |
PROBLEM TO BE SOLVED: To provide a solid filter or smoke trap that can effectively collect solid ingredients in the MOCVD exhaust gas and does not cause pipe clogging easily. SOLUTION: This solid filter circulates gas including at least one solid ingredient. As needed, it not only provides a means for cooling the gas below a temperature where at least one solid ingredient in the gas is solidified, but also has a structure where a gas channel is bent any number of times within the corresponding solid filter. COPYRIGHT: (C)2006,JPO&NCIPI
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