| 摘要 |
PROBLEM TO BE SOLVED: To provide a scanning electron microscope capable of detecting secondary electrons generated from a whole face of a target in high efficiency. SOLUTION: On the scanning electron microscope 100, constituted by arranging an object lens 130 having a decelerating field in the vicinity of a sample, at least two or more detectors 120 are arranged in axial symmetry to an electrooptic axis O, a target 110 colliding with the secondary electrons and reflecting electrons is arranged in the vicinity of the detectors 120, and at least one almost axisymmtric electrode member 150 having a more negative potential than that of the target 110 are arranged under the target 110. COPYRIGHT: (C)2006,JPO&NCIPI
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