发明名称 EVALUATION METHOD FOR SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an evaluation method capable of evaluating easily an marked element or parameter, capable of obtaining an accurate result, and capable of the result quickly. SOLUTION: A plurality of evaluation circuits is formed in the same substrate, and the plurality of evaluation circuits is operated at the same time to evaluate properly an output of the one evaluation circuit selected by a selection circuit formed on the substrate. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2006003344(A) 申请公布日期 2006.01.05
申请号 JP20050142852 申请日期 2005.05.16
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 ASANO ETSUKO;KATO KIYOSHI;SHIONOIRI YUTAKA;HAYAKAWA MASAHIKO
分类号 G01R31/28;H01L21/66 主分类号 G01R31/28
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