THIN FILM COATER OF INKJET TYPE

摘要

PROBLEM TO BE SOLVED: To provide a thin film coater that can quickly uniform the mass or flying speed of droplets sprayed from two or more nozzles. SOLUTION: The thin film coater of inkjet type, where an electrode comprises a crystal vibrator the resonance frequency of which varies according to the mass of a substance stuck to the surface and the crystal vibrator serves to spray the droplets from the inkjet nozzles to form a thin film, is equipped with a means for measuring the above mass of droplets or flying speed of the droplets. COPYRIGHT: (C)2006,JPO&NCIPI