发明名称 Method for manufacturing plasma display panel
摘要 A method of depositing a high quality metal oxide film onto a substrate of a plasma display panel is provided. At a process for forming protective layer ( 8 ) of MgO film which is a metal oxide film, the film is formed within a range of 1x10<SUP>-1 </SUP>Pa to 1x10<SUP>-2 </SUP>Pa in a degree of vacuum in evaporation room ( 21 ) which is a deposition room, so that a depositing rate and film quality improve in forming protective layer ( 8 ). As a result, a plasma display panel which can display high quality images can be manufactured.
申请公布号 US2006003086(A1) 申请公布日期 2006.01.05
申请号 US20050532672 申请日期 2005.04.26
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. 发明人 TAKASE MICHIHIKO
分类号 H01J9/00;B05D5/06;B05D5/12;H01J9/02;H01J9/24;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/40 主分类号 H01J9/00
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