发明名称 |
Method for manufacturing plasma display panel |
摘要 |
A method of depositing a high quality metal oxide film onto a substrate of a plasma display panel is provided. At a process for forming protective layer ( 8 ) of MgO film which is a metal oxide film, the film is formed within a range of 1x10<SUP>-1 </SUP>Pa to 1x10<SUP>-2 </SUP>Pa in a degree of vacuum in evaporation room ( 21 ) which is a deposition room, so that a depositing rate and film quality improve in forming protective layer ( 8 ). As a result, a plasma display panel which can display high quality images can be manufactured.
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申请公布号 |
US2006003086(A1) |
申请公布日期 |
2006.01.05 |
申请号 |
US20050532672 |
申请日期 |
2005.04.26 |
申请人 |
MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD. |
发明人 |
TAKASE MICHIHIKO |
分类号 |
H01J9/00;B05D5/06;B05D5/12;H01J9/02;H01J9/24;H01J11/12;H01J11/22;H01J11/24;H01J11/26;H01J11/34;H01J11/40 |
主分类号 |
H01J9/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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