| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a cold cathode electron source which can be manufactured easily and has a high resolution and its manufacturing method. <P>SOLUTION: The cold cathode electron source 30 emits electrons from a CNT film 4 by a voltage impressed on a conductive membrane 5 and a conductive membrane 6, and comprises an insulating film 2, the conductive membrane 5 formed on the insulating film 2, the conductive membrane 6 formed on the conductive membrane 5, and an insulating film 7 formed between the conductive membrane 5 and the conductive membrane 6. Each of holes 2a, 5a are opened at each of the insulating film 2 and the conductive membrane 5, and a hole 12 which is connected to the holes 2a, 5a is opened at the conductive membrane 6. Furthermore, the CNT film 4 is provided which is formed at the bottom part of the holes 2a, 5a. The diameter of the hole 12 becomes smaller as it goes away from the insulating film 7. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |
