Process for producing plasma display panel and apparatus therefor

摘要

A method for depositing a high quality metal oxide film onto a substrate of a plasma display panel is provided. At a process for forming protective layer ( 8 ) of MgO film which is a metal oxide film, the film is formed in such a manner that partial pressure of oxygen gas or the like in evaporation room ( 21 ) which is a deposition room is within a certain range. Using this method, deposition is performed with an atmosphere in evaporation room ( 21 ) constant, so that physical properties of a film can be stabilized. As a result, a plasma display panel which can display high quality images can be manufactured.