发明名称 ACOUSTIC RESONATOR
摘要 <p><P>PROBLEM TO BE SOLVED: To provide an acoustic resonator that suppresses energy loss. <P>SOLUTION: The acoustic resonator includes a substrate, a first electrode, a piezoelectric layer, a second electrode and a recessed region. The substrate has a first surface. The first electrode is adjacent to the first surface of the substrate. The piezoelectric layer is adjacent to the first electrode. The second electrode is adjacent to the piezoelectric layer. The second electrode has a second electrode perimeter part formed as a polygon. The recessed region is adjacent to the second electrode. The recessed region has a shape, defining a recessed region perimeter part. The recessed region perimeter part is recessed farther, as compared with the second electrode perimeter part. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p>
申请公布号 JP2006005924(A) 申请公布日期 2006.01.05
申请号 JP20050169397 申请日期 2005.06.09
申请人 AGILENT TECHNOL INC 发明人 FENG HONGIUN;FAZZIO RONALD S;BRADLEY PAUL D;RUBY RICHARD C
分类号 H03H9/17;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H03H3/02;H03H9/02;H03H9/54;H03H9/58 主分类号 H03H9/17
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