摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an acoustic resonator that suppresses energy loss. <P>SOLUTION: The acoustic resonator includes a substrate, a first electrode, a piezoelectric layer, a second electrode and a recessed region. The substrate has a first surface. The first electrode is adjacent to the first surface of the substrate. The piezoelectric layer is adjacent to the first electrode. The second electrode is adjacent to the piezoelectric layer. The second electrode has a second electrode perimeter part formed as a polygon. The recessed region is adjacent to the second electrode. The recessed region has a shape, defining a recessed region perimeter part. The recessed region perimeter part is recessed farther, as compared with the second electrode perimeter part. <P>COPYRIGHT: (C)2006,JPO&NCIPI</p> |