Control apparatus for controlling introduction of process waste gas, has control valve which closes inflow/outflow port airtightly when liquid is filled inside of area of process waste-gas pipe, and opens inflow/outflow port when empty

摘要

The apparatus has a control valve (3) provided at the area (1) of a process waste-gas pipe (2) for opening and closing an inflow/outflow port (4) for process waste gas of component (5) for post-process. The control valve closes the inflow/outflow port airtightly when liquid is filled inside of the area, and opens the inflow/outflow port when emptying the pipe. An independent claim is also included for a control apparatus for process waste gas.