| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a substrate carrying device capable of reliably carrying out a substrate from an electrostatic chuck, when suspending the substrate from a stage device for retaining. <P>SOLUTION: The substrate carrying device comprises a chuck 4 that is arranged on a stage 11 and has a chucking surface for retaining the substrate 5 downward; a substrate placement section 2 for placing the substrate 5 at the upper side; a carrier arm 1 for carrying in or out the substrate 5 at the lower side of the chuck 4; and a plurality of hooking claws 3 arranged while the substrate placement section 2 is separated. The hooking claw 3 has a base part 3a that is formed at the substrate placement section 2 and projects toward the upper side as compared with the substrate 5, and a claw section 3b overhanging from the base part 3a toward the substrate placement section 2. In this case, the substrate placement section 2 is separated from the chuck 4 in a vertical direction when the substrate is carried out, and the substrate 5 chucked onto the chucking surface is pressed to the claw section 3b. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
