| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of a die, a die for an optical part in particular, capable of making the die in high precision in a short time. SOLUTION: The method includes a pattern forming process of forming a conductive pattern on a surface of a substrate using lithography technique and a process of cutting the conductive pattern using a mechanical cutting means. Concretely after a reversal pattern 22 is formed on the surface of the substrate 10, the reversal pattern 22 is cut in ultra high precision with a single crystal diamond bit 30 to form a prism portion 23. COPYRIGHT: (C)2006,JPO&NCIPI |
