发明名称 Planar motor initialization method, planar motro, lithographic apparatus and device manufacturing method
摘要 A planar motor is controlled by supplying a three-phase alternating current to a coil assembly. Each phase is supplied to one of three coils. The coils are positioned in a magnetic field generated by a magnet plate having alternating magnet poles at its surface for generating an alternating magnetic field. In operation, the phase of each current flowing through each coil determines the direction of a force generated due to the current in the magnetic field. For correct operation, the phase angle of each current is to be adapted to the local direction of the magnetic field by determining a commutation-offset angle. The commutation-offset angle is determined by generating a force in an unknown direction and varying the commutation-angle, and determining when the generated force is directed perpendicular to the magnet plate, while ensuring that the generated force does not exceed a horizontal friction force. By determining a maximum compression of end stops of the coil assembly, or determining a maximum pressure, it may be determined when the generated force is directed perpendicular to the magnet plate.
申请公布号 US2005285550(A1) 申请公布日期 2005.12.29
申请号 US20040874691 申请日期 2004.06.24
申请人 ASML NETHERLANDS B.V. 发明人 SIMONS WILHELMUS FRANCISCUS J.;COX HENRIKUS HERMAN M.;HOL SVEN ANTOIN J.
分类号 G03F7/20;H02K41/00;H02K41/03;H02P1/00;(IPC1-7):H02K41/00 主分类号 G03F7/20
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