发明名称 Flip chip bonder
摘要 A flip chip bonder including a substrate holding mechanism and a chip die bonder for bonding a semiconductor chip having a plurality of electrodes projecting from its front surface to a substrate held on the substrate holding means. The flip chip bonder includes a chuck table, a semiconductor chip take-out area and an electrode cutting area, a cutting mechanism having a cutting tool for cutting the plurality of electrodes projecting from the front surface of the semiconductor chip held on the chuck table and arranged in the electrode cutting area to make them uniform in height, a semiconductor chip take-in mechanism, and a semiconductor chip conveying mechanism.
申请公布号 SG117482(A1) 申请公布日期 2005.12.29
申请号 SG20040001977 申请日期 2004.11.08
申请人 DISCO CORPORATION 发明人 KAZUHISA ARAI;TAKASHI MORI;HIDEYUKI SANDOH;SHINICHI NAMIOKA
分类号 H01L21/60;B23K20/00 主分类号 H01L21/60
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