发明名称 Fluid storage and dispensing system
摘要 <p>A fluid storage and dispensing system (10) comprising a vessel (12) for holding a fluid (17) at a desired pressure. The vessel has a pressure regulator (26) set at a predetermined pressure. The regulator may be interiorly or exteriorly positioned, single-staged or multi-staged, and is associated with a port of the vessel. A dispensing assembly, e.g. including a flow control means such as a valve (20), is arranged in gas/vapor flow communication with the regulator (26), whereby the opening of the valve effects dispensing of gas/vapor from the vessel (12). The fluid in the vessel may be constituted by a liquid that is confined in the vessel at a pressure in excess of its liquefaction pressure at prevailing temperature conditions, e.g. ambient (room) temperature.</p>
申请公布号 EP1610053(A2) 申请公布日期 2005.12.28
申请号 EP20050017857 申请日期 1999.04.28
申请人 ADVANCED TECHNOLOGY MATERIALS, INC. 发明人 WANG, LUPING;TOM, GLENN
分类号 C23C14/24;C23C16/448;F17C1/00;F17C7/00;F17C7/02;F17C7/04;F17C9/02;F17C11/00;F17C13/00;F17C13/02;F17C13/04;H01L21/205;H01L21/265;H01L21/306;(IPC1-7):F17C7/04 主分类号 C23C14/24
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