Pressure sensor

摘要

The invention relates to a pressure sensor comprising a sensor element ( 2 ) having a flat membrane ( 4 ) which is transformed at its edge into a hollow-cylindrical ring ( 6 ) so that a central recess ( 20 ) is provided at the lower side ( 10 ) of the membrane ( 4 ). On the upper side ( 8 ) of the membrane ( 4 ) a resistance arrangement consisting of electric resistors is disposed. A sleeve ( 54 ) projects into the recess ( 20 ) and supports a first elastomeric sealing ring ( 66 ) which is tightly arranged at the circumferential area of the recess ( 20 ). Furthermore the sleeve ( 54 ) supports a second elastomeric sealing ring ( 68 ) which serves for sealing at a feeding tube for pressure fluid formed in a component part to which the pressure sensor is mountable. The sleeve ( 54 ) is rigidly connected to a disk ( 56 ) which is attached with its outer edge ( 58 ) to a casing ( 26 ) enclosing the sensor element ( 2 ). Mechanical forces occurring during and after assembly of the pressure sensor to the component part are introduced into the casing ( 26 ) via the sleeve ( 54 ) and the disk ( 56 ) so that the sensor element ( 2 ) is kept free from mechanical distortions which might entail an undesired deformation of the membrane ( 4 ) and consequently a falsification of the measuring signal.