发明名称 FORMING METHOD OF SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To avoid the use of an expensive process by using an inexpensive material, and to inexpensively provide a large amount of semiconductor devices of high performance. SOLUTION: The semiconductor device is formed by a forming method comprising a process for forming a gate electrode 2 on at least a flexible insulating substrate 1; a process for forming a gate insulating film 4 on the gate electrode 2; a process for forming source/drain electrodes 5 on the gate insulating film; a process for polishing and removing a part of the source/drain electrodes 5 and the gate insulating film 4, and forming a channel between the source/drain electrodes; and a process for forming a semiconductor layer 6 between the channels. COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005354035(A) 申请公布日期 2005.12.22
申请号 JP20050096593 申请日期 2005.03.30
申请人 TOPPAN PRINTING CO LTD 发明人 NAKAMURA RYUICHI;MATSUBARA RYOHEI
分类号 H01L21/283;H01L21/288;H01L21/336;H01L29/786;H01L51/00;H01L51/05;(IPC1-7):H01L21/336 主分类号 H01L21/283
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