| 摘要 |
PROBLEM TO BE SOLVED: To positively maintain the supply quantity of wash water to washing nozzles with a small quantity at a low cost when rinsing with the supply of wash water after washing with washing liquid. SOLUTION: This device comprises the washing nozzles 51, 52 expanded/contracted according to water pressure; nonexpansible washing nozzles 53, 54; a passage changeover part 20 for supplying wash water from a water supply line 10 selectively to the washing nozzles; and a washing liquid injection part for injecting the washing liquid into the water supply line from a washing liquid holding part 6. The device comprises a washing liquid washing mode and a rinsing washing mode, and has a flow dividing line for dividing a part of wash water supplied to the nonexpansive washing nozzles, to the expansive washing nozzles. In the device, the rinsing washing mode following the washing liquid mode for supplying the wash water mixed with the washing liquid, to the expansive washing nozzles is performed by supplying wash water to the nonexpansive washing nozzles. Rinsing washing for the expansive washing nozzles is performed by dividing a part of the wash water supplied to the nonexpansive washing nozzles, to the expansive washing nozzles. COPYRIGHT: (C)2006,JPO&NCIPI
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