| 摘要 |
PROBLEM TO BE SOLVED: To provide a grinding method for a workpiece, which contributes to shortening of a grinding period of an irregular-shaped workpiece, and to provide a grinding device for a workpiece. SOLUTION: According to the grinding method for grinding a surface of a workpiece 2 with a grinding wheel 3, an AE signal generated in an interference region between the grinding wheel and the workpiece is detected by an AE sensor head 40 set on a chuck surface in the vicinity of the workpiece, and the AE signal is passed through a low-pass filter 43 for passing a predetermined frequency band therethrough, followed by extracting an essential frequency from the passed AE signal. When a value (E<SB>i</SB>) of the AE signal in the essential frequency is higher than a predetermined trigger value (E<SB>0</SB>) of the AE signal in the essential frequency, a work table 4 is advanced in one direction, whereas when the value (E<SB>i</SB>) of the AE signal in the essential frequency reaches the predetermined trigger value (E<SB>0</SB>) or below of the AE signal in the essential frequency, an inverting signal is transmitted to a driving means of the work table to invert the work table 4. In this manner the work table 4 can shorten its idle moving distance during the time when workpiece is not ground. COPYRIGHT: (C)2006,JPO&NCIPI
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