| 摘要 |
PROBLEM TO BE SOLVED: To provide fine processing of a type in which voltage is applied between working fluid and a workpiece using a combination of a scan type shear force microscope and a hollow probe. SOLUTION: A micro-pipet probe 12, the tip of which is opened, is used as the probe of the scan type shear force microscope. The interior of the probe is filled with plating liquid 48. With the tip of the probe brought into contact with a desired position on the surface of the workpiece 18, voltage is applied between the plating liquid 48 and the workpiece support 16 only for predetermined time. Thus, the surface of the workpiece 18 is subjected to micro-plating processing. COPYRIGHT: (C)2006,JPO&NCIPI
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