发明名称 Field effect transistor and fabrication method thereof
摘要 A field effect transistor of the present invention includes, on a semiconductor substrate, (i) a fin section formed in a fin shape protruding from the substrate, (ii) a gate dielectric for covering a channel region section of the fin section, (iii) a gate electrode that is insulated from the channel region section by the gate dielectric and is formed on the channel region section and (iv) an insulating layer for covering a surface of the semiconductor substrate. The fin section is formed so as to extend from the semiconductor substrate through the insulating layer and protrudes outward from a surface of the insulating layer. In this way, the channel region of the fin section is physically in contact with the substrate.
申请公布号 US2005282342(A1) 申请公布日期 2005.12.22
申请号 US20050157077 申请日期 2005.06.21
申请人 ADAN ALBERTO O 发明人 ADAN ALBERTO O.
分类号 H01L21/336;H01L29/786;(IPC1-7):H01L21/336 主分类号 H01L21/336
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