| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide closed loop controlling equipment operating in high speed, high accuracy, and stability. <P>SOLUTION: The equipment comprises a controlling valve controlling either of a pressure or a quantity of fluid, a fluid encapsulating means for being extended/contracted by fluid pressure from the controlling valve, a controlling amount detecting means for detecting controlling amount from a controlled object, a first compensating means for making a difference as an input signal between the target value of the controlling amount and a signal from the above-mentioned controlling amount detecting means, a second compensating means for making a difference as an input signal between an output signal of the first compensating means and a signal from the above-mentioned controlling amount detecting means, and a deviation signal detecting means for detecting an input signal to the above-mentioned second compensating means. And, a primary controlling loop is constituted by the above-mentioned first compensating means. Furthermore, a secondary controlling loop is constituted by the above-mentioned second compensating means. Then, when the target value of the above-mentioned controlling amount changes, the equipment is constituted so that a signal correlating to the gain of the above-mentioned secondary controlling loop may be detected by the above-mentioned deviation signal detecting means. <P>COPYRIGHT: (C)2006,JPO&NCIPI |
