发明名称 HOLDING STRUCTURE OF OPTICAL MEMBER AND EXPOSURE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To provide the holding structure of an optical member which hardly causes distortion of the optical member and is suited for the enhancement of a performance of an optical device. <P>SOLUTION: In the structure, the optical member 10 is held via a holding member 12. Further, the holding member 12 and the optical member 10 are bonded to each other via an adhesive 13. Bonding surfaces 10a, 12a of the holding member 12 and the optical member 10 are mirror-finished, respectively. <P>COPYRIGHT: (C)2006,JPO&NCIPI
申请公布号 JP2005352037(A) 申请公布日期 2005.12.22
申请号 JP20040171118 申请日期 2004.06.09
申请人 NIKON CORP 发明人 TAZAWA HISASHI;YAMASHITA OSAMU
分类号 G02B7/00;G02B7/18;G03F7/20;H01L21/027 主分类号 G02B7/00
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