MULTI-AXIS CAPACITIVE TRANSDUCER AND MANUFACTURING METHOD FOR PRODUCING IT

摘要

A design for a multiple axis capacitive force sensor (1) is provided with a resolution in the [,u N] to [nN] range and a multiple axis capacitive accelerometer (1). The sensors (1) are designed such that no assembly is required. A deformable structure (S1, .., S4) transforms the force applied on the probe tip (10) into a displacement of the movable body (11). This displacement is measured by capacitor plate pairs (C1,..,C7). The capacitor plates (Cl, ..,C7) are oriented such that a measurement of up to six degrees of freedom is possible. In case of the force sensor (1) these are: force components Fx, Fy, Fz and moment components Mx, My, Mz. By applying a voltage (V) to the electrodes, the proposed structure can also be used as an actuator to exert forces and torques on micro-parts.