| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical interference type membrane thickness information acquiring device, using an optical fiber for a light casting optical system and a light-receiving optical system which is hardly affected by variation of refractive index to be used in membrane thickness calculation, depending on the TD position of the film to be measured. SOLUTION: The membrane thickness information acquiring device comprises the floodlighting optical system for food lighting on the measuring object film, the light-receiving optical system for receiving the reflected light or transmitted light from the object to be measured, an interference waveform generating means for generating the interference waveform data of the received reflected light or the transmitted light, and a membrane thickness information transmission means for transmitting the generated interference waveform data. Here, the floodlighting optical system is provided with a plurality of optical fibers for floodlighting, and the light-receiving optical system is provided with a plurality of optical fibers for light receiving. The segment, connecting a central point of emission of an arbitrary optical fiber for light casting with a central point of introduction of an arbitrary optical fiber for light-receiving, is arranged in isotropic manner around the light axis of the membrane thickness information acquiring device. COPYRIGHT: (C)2006,JPO&NCIPI
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