| 发明名称 |
Mask, method for producing the same, deposition method, electronic device, and electronic apparatus |
| 摘要 |
A mask includes a first portion having an opening, a second portion disposed in the opening and surrounded by the opening, and a beam connecting the first portion to the second portion.
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| 申请公布号 |
US2005282368(A1) |
申请公布日期 |
2005.12.22 |
| 申请号 |
US20050113920 |
申请日期 |
2005.04.25 |
| 申请人 |
YOTSUYA SHINICHI |
发明人 |
YOTSUYA SHINICHI |
| 分类号 |
C23C14/04;(IPC1-7):H01L21/425 |
主分类号 |
C23C14/04 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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