Method for forming microlens of image sensor

摘要

Disclosed is a method for forming a plurality of microlenses of an image sensor capable of making no gap between the plurality of the microlenses. The method for fabricating a microlens array includes the steps of: depositing a first photoresist layer on a semi-finished substrate; selectively patterning the first photoresist layer, thereby forming a first photoresist layer pattern; forming a plurality of first microlenses by flowing the first photoresist pattern; depositing a second photoresist layer on the first microlenses and the semi-finished substrate; forming a second photoresist pattern between the first microlenses by selectively patterning the second photoresist layer; and forming a plurality of second microlenses between the first microlenses by flowing the second photoresist pattern.