Atomic force microscope and corrector thereof and measuring method

摘要

An atomic force microscope includes a tip ( 12 ). The tip is shifted to determine a height of a surface interval ( 44 ) of an object, wherein the surface interval is substantially sloped at an angle above the horizontal and defines a point ( 42 a). The atomic force microscope includes a light source ( 31 ) and an analyzer ( 33 ). The light source applies a number of light beams onto the point of the surface interval, and the applied light beams are reflected by the surface interval. The analyzer analyzes the reflected light beams in order to determine the angle above the horizontal.