ELECTRIC FUSE ACTING AS PROGRAMMABLE DATA STORAGE

摘要

PROBLEM TO BE SOLVED: To provide an electric fuse which can uniformly blow at a low power level. SOLUTION: An electric fuse 100 comprises a silicide layer 204 formed on a polysilicon layer 202, a first insulator for isolating the electric fuse 100 from the semiconductor substrate 212, and a second insulator for isolating the electric fuse from at least one conductor placed on the first isolator. The polysilicon layer 202 is at least 2,000Åin thickness and 0.14μm or less in width. Further, the second insulator substantially contains a low-K material. COPYRIGHT: (C)2006,JPO&NCIPI