发明名称 Stencil mask and method of producing the same
摘要 A stencil mask has a thin film (11) having an aperture pattern (13). A material layer (14) having heat conductance higher than that of the thin film (11) is set in a region except for a portion (c) of outer edge of the aperture pattern (13) in the side of a principal surface of the thin film (11). <??>The invention further relates to a method for producing such a stencil work. <IMAGE>
申请公布号 EP1531361(A3) 申请公布日期 2005.12.21
申请号 EP20040292684 申请日期 2004.11.12
申请人 SONY CORPORATION;ROHM CO., LTD. 发明人 HIRAKAWA, TADAHIKO;KUMANO, HIROSHI
分类号 H01L21/266;G03F1/20;H01L21/027;H01L21/265 主分类号 H01L21/266
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