| 摘要 |
This invention provides a device for capacitively measuring the distance to an object, which comprises an electrode that will couple capacitively with the object, a shield (16) that surrounds the electrode (4) and is electrically isolated from the electrode by means of insulation (14, 18), and a layer of insulation that surrounds the shield, wherein the insulation between the electrode and the shield, and the insulation that surrounds the shield, are formed by deposition. This invention further provides a method for measuring the distance to a solid object, which comprises forming an electrode that will capacitively couple with the object, depositing a layer of insulation over at least part of the electrode so that the insulation surrounds the electrode, depositing a layer of metal (16) over the insulation to form a shield, and depositing a second layer of insulation over the shield.
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