发明名称 |
SUBSTRATE SUPPORT HAVING TEMPERATURE CONTROLLED SURFACE |
摘要 |
A substrate support having a temperature controlled substrate support surface includes a liquid supply system having at least one liquid source and a plurality of liquid flow passages. The liquid supply system can include valves to control the distribution of liquid to the liquid flow passages. The liquid supply system also can include a controller to control its operation. Liquid can be distributed through the liquid flow passages in various patterns. The substrate support can also include a heat transfer gas supply system, which supplies a heat transfer gas between the substrate support surface and a substrate supported on the substrate support surface.
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申请公布号 |
KR20050118716(A) |
申请公布日期 |
2005.12.19 |
申请号 |
KR20057018806 |
申请日期 |
2004.03.30 |
申请人 |
LAM RESEARCH CORPORATION |
发明人 |
DAWSON KEITH E.;LENZ ERIC H. |
分类号 |
C23C16/458;H01L21/00;H01L21/683;H01L21/687;(IPC1-7):H01L21/02 |
主分类号 |
C23C16/458 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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