| 摘要 |
PROBLEM TO BE SOLVED: To provide an excitation-type contact detection sensor capable of preventing damage of a stylus without providing an axial clearance mechanism for the stylus. SOLUTION: The excitation-type contact detection sensor 1 comprises an excitation-type contact detection means including a stylus 20, an excitation means 31 and a detection means 32; and a holder 10. The holder 10 comprises a parallel plate spring 14 including a plurality of plate springs 141. The excitation type contact detection means is supported by the parallel plate spring 14, and the stylus 20 is arranged so that its axial direction is substantially laid along the elastically deformable direction of the parallel plate spring 14. COPYRIGHT: (C)2006,JPO&NCIPI
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