ELECTRON BEAM DETECTOR, ELECTRON BEAM DRAWING METHOD USING THE SAME, AND ELECTRON BEAM DRAWING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide an electron beam detector of transmission type which measures the profile of a plurality of electron beams in proximity simultaneously, and an electron beam drawing technology which realizes a high precision drawing using the same. SOLUTION: The electron beam detector comprises a means (103) of transforming the electron beams (101) passed through aperture marks (102) into light (105) and a plurality of light detecting elements (107) corresponding to them, and by scanning the electron beams on the marks, separates (106) the generated light (105), and carries out simultaneous measurement of the profile of a plurality of electron beams. COPYRIGHT: (C)2006,JPO&NCIPI