发明名称 |
Topology simulation system, topology simulation method, and computer product |
摘要 |
A matrix computing unit evaluates visual properties influenced by a positional relationship between surface elements of an element so that a shading effect and a re-deposition effect are reflected to the simulation results. A beam condition computing unit calculates beam conditions according to a position of the element on a wafer so that a difference in machined topologies caused by a positional difference on the wafer is reflected to the simulation results.
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申请公布号 |
US2005278060(A1) |
申请公布日期 |
2005.12.15 |
申请号 |
US20040941946 |
申请日期 |
2004.09.16 |
申请人 |
FUJITSU LIMITED |
发明人 |
FURUYA ATSUSHI |
分类号 |
G06F17/50;G06F19/00;H01L21/00;H01L21/3065;(IPC1-7):G06F19/00 |
主分类号 |
G06F17/50 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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